更新时间：2024-08-28 09:31
2005年毕业于清华大学精密仪器与机械学系，获工学学士学位；
2010年毕业于清华大学精密仪器与机械学系，获工学博士学位。
摩擦学、表界面理论与技术。具体如下：纳米至原子尺度下表面间相互作用机理研究；纳米摩擦学，摩擦机理研究；半导体制造工艺中的化学机械抛光技术及超净表面制备技术；扫描探针显微镜在微纳米尺度摩擦学方面的应用研究。
[1]Huang Y T, Li Y, Guo D, et al. Probing particle removal in brush scrubber cleaning with fluorescence technique. Sci China Tech Sci, 2013, 56:2994-3000
[2]Yating Huang, Dan Guo, Xinchun Lu, Jianbin Luo，Modeling of particle removal processes in brush scrubber cleaning，Wear, Volume 273, Issue 1, November 2011, Pages 105-110
[3]黄雅婷,孟春玲,董秀萍,路新春,铜互连兆声清洗中结构损伤预测的有限元分析,光学精密工程，2013, 21(8) 2064-2070
[4]Yating Huang, Dan Guo, Xinchun Lu , Jianbin Luo, A lubrication model between the soft porous brush and rigid flat substrate for post-CMP cleaning, Microelectronic Engineering, Volume 88, Issue 9, September 2011, Pages 2862-2870
[5]YT Huang, CL Meng, NP Wu, XP Dong, XC Lu, Finite Element Analysis of Failure in Cu Interconnect Megasonic Cleaning, Key Engineering Materials 562, 1471-1476
[6]YT Huang, XP Dong, Simulation of Acoustic Field for Megasonic Bath Cleaning in Advanced Semiconductor Manufacturing, Applied Mechanics and Materials 289, 81-86